Comparison ledger
Brooks 017-0024-01 Prealigner, SUSS MicroTec MA 150 CC Mask, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0024-01 PrealignerBrooks | MA 150 CC MaskSUSS MicroTec |
|---|---|---|
| OEM | Brooks | SUSS MicroTec |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0024-01 Prealigner | SUSS MicroTec MA 150 |
| Specifications | ||
| Configuration | — | Topside Alignment[1] |
| Max Wafer Size | — | 6"/150mm Wafer Capable[1] |
| Make | — | SUSS[1] |
| Model | — | MA 150 CC[1] |
| Tool type | — | Mask Aligner[2] |
| Wafer sizes | — | 2, 3, 4, 5, 6 inch[1] |
| Topside alignment | — | Supported[1] |
| Operation mode | — | Automatic or manual mode[2] |
| Alignment | — | Automatic alignment[1] |
| Prealigner | — | Optical prealigner[2] |
| Lamp house | — | 1000 Watt lamphouse[1] |
| Optics | — | UV400 optics for 365nm and 405nm exposure[1] |
| Front lens | — | UV400 front lens[1] |
| Lamp power supply | — | Suss CIC 1000 Lamp Power Supply[1] |
| Microscope | — | Suss DVM 6 Microscope[1] |
| Camera | — | CCD camera right and left[1] |
| Contact exposure modes | — | Hard, soft, and vacuum contact exposure modes[1] |
| Display | — | Flat panel touchscreen[1] |
| Documentation | — | Operations manual[1] |
| OEM | — | SUSS MicroTec[2] |
| Category | — | Lithography[2] |
| Wafer handling | — | Cassette to Cassette Operation[2] |
| Power | — | 1000 Watt Lamphouse[2] |
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