SUSS MicroTec
MA 150 CC Mask
The SUSS MicroTec MA 150 CC Mask is a mask aligner used in lithography. The SUSS MicroTec MA 150 CC Mask has topside alignment. The SUSS MicroTec MA 150 CC Mask is capable of hard, soft, and vacuum contact exposure modes.[1][2]
Plate 01Karl Suss MA150cc Mask Aligner (ID# 3532)
ClassOneEngineeringWatch on YouTubePlate 02Refurbishing and Converting a SUSS MA150cc to a MA150cc/e
SUSSWatch on YouTubePlate 03Suss MA150 Mask Aligner De-Installation by ClassOne Equipment
ClassOneVideosWatch on YouTube
What it is
How it works
The SUSS MicroTec MA 150 CC Mask uses an optical prealigner and automatic alignment. The SUSS MicroTec MA 150 CC Mask has right and left CCD cameras and a Suss DVM 6 microscope. The SUSS MicroTec MA 150 CC Mask uses UV400 optics for 365 nm and 405 nm exposure and includes a UV400 front lens. The SUSS MicroTec MA 150 CC Mask has a 1000 watt lamphouse and a Suss CIC 1000 lamp power supply. The SUSS MicroTec MA 150 CC Mask is capable of hard, soft, and vacuum contact exposure modes. The SUSS MicroTec MA 150 CC Mask has a flat panel touchscreen.[2][1]
Applications
What do the numbers mean?
Power & electrical5
Vacuum & pumping2
- Capable of Hard, Soft, and Vacuum Contact Exposure Modes[2]
Wafer handling4
- Cassette to Cassette Operation[2]
Optics & imaging10
Performance5
Control & software2
- Flat Panel Touchscreen[2]
Configuration & options10
What replaced it?
Alternatives
Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.
- Canon FPA 3000 i 5 + Fine Pattern— Same function class: Lithography, nullCompare in depthsource[4]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Configuration1000 Watt Lamphouse[2]
- ConfigurationSuss CIC 1000 Lamp Power Supply[2]
- ConfigurationCapable of Hard, Soft, and Vacuum Contact Exposure Modes[2]
- Lamp house1000 Watt lamphouse[2]
- Lamp power supplySuss CIC 1000 Lamp Power Supply[2]
- Contact exposure modesHard, soft, and vacuum contact exposure modes[2]
- Power1000 Watt Lamphouse[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What wafer sizes does the MA 150 CC support?
The SUSS MA 150 CC supports wafer sizes of 2, 3, 4, 5, and 6 inch. The maximum wafer size is 6 inch or 150 mm.[2][1]
What alignment approach does the MA 150 CC use?
The SUSS MA 150 CC is a topside-alignment system. The SUSS MA 150 CC also includes automatic alignment and an optical prealigner.[2][1]
Not publicly documented
The following facts about the MA 150 CC Mask are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the MA 150 CC Mask are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the MA 150 CC Mask are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the MA 150 CC Mask are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the MA 150 CC Mask are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the MA 150 CC Mask is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]waferpedia.com — waferpedia.comwaferpedia.com
- [2]Inventory photo
- [3]Inventory photo
- [4]Equipment inventory listing
Last updated Oct 21, 2026.
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