Comparison ledger
Brooks 017-0024-01 Prealigner, SUSS MicroTec MA 6 BA 6 Gen 2 Mask, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0024-01 PrealignerBrooks | MA 6 BA 6 Gen 2 MaskSUSS MicroTec |
|---|---|---|
| OEM | Brooks | SUSS MicroTec |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0024-01 Prealigner | SUSS MicroTec MA 6 Mask |
| Specifications | ||
| Configuration | — | Topside (TSA) Alignment[1] |
| Power | — | 1500W Lamphouse[1] |
| System Power | — | 230V, 50/60 Hz[1] |
| Alignment modes | — | Topside (TSA) alignment; backside (BSA) alignment[1] |
| Optics | — | UV400 splitfield optics for 365nm and 405nm exposure[1] |
| Power supply | — | CIC 500 power supply[1] |
| Contact modes | — | Hard, soft, and vacuum contact with proper tooling[1] |
| Lamphouse | — | 1500W lamphouse[1] |
| Wafer chuck | — | 150mm chuck included[1] |
| Maskholder | — | 7x7 maskholder included[1] |
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