Comparison ledger
Brooks 017-0146-01 Prealigner, Canon FPA 2500 i 3, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0146-01 PrealignerBrooks | FPA 2500 i 3Canon |
|---|---|---|
| OEM | Brooks | Canon |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0146-01 Prealigner | Canon FPA 2500 |
| Specifications | ||
| Configuration | — | Some problems of alignment repeatability not stable (can be fixed by FSE)[1] |
| Manufacturer | — | Canon[1] |
| Model | — | FPA 2500 i 3[1] |
| Equipment type | — | Stepper[2] |
| Category | — | Lithography[2] |
| Wafer size | — | 8 inch[1] |
| Reticle size | — | 5 inch[3] |
| Manufacture year | — | 1993[3] |
| Wafer type | — | Notch[3] |
| Chuck type | — | Ring[3] |
| Auto feed | — | Left hand[3] |
| Track interface | — | Yes[3] |
| Software version | — | VS 5.26 BW[3] |
| Performance metric | — | IUC Uniformity NA/Sigma mode (54/60) 517[3] |
| Known issue | — | Some problems of alignment repeatability not stable (can be fixed by FSE)[2] |
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