Waferpedia

Canon

FPA 2500 i 3 i-Line

LithographyCanon FPA 2500 family
Research Quality: 20% complete
FPA 2500 i 3 i-Line — Inventory photo
Fig. 01FPA 2500 i 3 i-LineInventory photo[1]

Performance

517[1]

Optics

5"[1]

What is it?

What do the numbers mean?

Wafer handling3

Wafer Type
Notch[1]
Accurate?
Chuck Type
Ring[1]
Accurate?
Optional Parts
High Speed Reticle Cassette Type[4]
Accurate?

Optics & imaging4

Reticle Size
5"[1]
Accurate?
Optional Parts
Canon Reticle Charger[1]
Accurate?
Lens Data:[1]
Accurate?
Reticle Barcode
Canon[2]
Accurate?

Performance4

IUC Uniformity NA/Sigma mode (54/60)
517[1]
Accurate?
IUC Uniformity NA/Sigma mode (50/70)
N/A[1]
Accurate?
IUC Uniformity NA/Sigma mode (54/60)
177[2]
Accurate?
IUC Uniformity NA/Sigma mode (54/60)
190[4]
Accurate?

Control & software4

Track Interface / Type
Yes[1]
Accurate?
Software version; VS 5.26 BW[1]
Accurate?
Track interface / Type
Yes / Tel[2]
Accurate?
Software Version
VS 5.26 BW[2]
Accurate?

Configuration & options8

Auto Feed
Left Hand[1]
Accurate?
Date
6/19/2023[1]
Accurate?
IUC Distribution NA/Sigma mode (54/60)
1.5[1]
Accurate?
IUC Distribution NA/Sigma mode (50/70)
N/A[1]
Accurate?
Date
6/12/2023[2]
Accurate?
IUC Distribution NA/Sigma mode (54/60)
1.7[2]
Accurate?
Date
6/30/2022[4]
Accurate?
IUC Distribution NA/Sigma mode (54/60)
1.6[4]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the FPA 2500 i 3 i-Line are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the FPA 2500 i 3 i-Line are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the FPA 2500 i 3 i-Line are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the FPA 2500 i 3 i-Line are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the FPA 2500 i 3 i-Line are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the FPA 2500 i 3 i-Line is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
  3. [3]Inventory photo
  4. [4]inventory listing
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Last updated Jul 29, 2026.

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