Comparison ledger
Brooks 017-0146-01 Prealigner, EV Group EV 620, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0146-01 PrealignerBrooks | EV 620EV Group |
|---|---|---|
| OEM | Brooks | EV Group |
| Category | Lithography | Lithography |
| Wafer size | — | Does not have the exposure optics. It is just a manual aligner for wafer bonding |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0146-01 Prealigner | EV Group EV 620 |
| Specifications | ||
| Wafer size | — | Does not have the exposure optics. It is just a manual aligner for wafer bonding[1] |
| Manufacturer | — | EV Group[1] |
| Model | — | EV 620[1] |
| Tool type | — | Bond Aligner[1] |
| Category | — | Lithography[2] |
| Exposure optics | — | Does not have the exposure optics[1] |
| Operating mode | — | Manual aligner for wafer bonding[1] |
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