Waferpedia

EV Group

EV 620

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Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

EV 620 — Inventory photo
Fig. 01EV 620Inventory photo[1]

Wafer size

Does not have the exposure optics. It is just a manual aligner for wafer bonding

Optics

Does not have the exposure optics[1]

What it is

The EV Group EV 620 is a lithography-category bond aligner.[3][2]

The EV Group EV 620 is a manual aligner for wafer bonding and does not have exposure optics.[1][2]

How it works

General reference — not yet source-verified

A bond aligner is used to align wafers before bonding.

A manual aligner relies on operator action rather than automated exposure optics for the alignment task.

Where it fits in the process flow

The EV Group EV 620 fits in wafer bonding preparation rather than exposure-based lithography.[1][2]

Applications

The EV Group EV 620 is used for wafer bonding workflows.[1][2]

What do the numbers mean?

Wafer handling3

Wafer size
Does not have the exposure optics. It is just a manual aligner for wafer bonding[1]
Accurate?
Wafer size
6 inch[1]
Accurate?
Operating mode
Manual aligner for wafer bonding[1]
Accurate?

Optics & imaging1

Exposure optics
Does not have the exposure optics[1]
Accurate?

Configuration & options4

Manufacturer
EV Group[1]
Accurate?
Model
EV 620[1]
Accurate?
Tool type
Bond Aligner[1]
Accurate?
Category
Lithography[2]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

Does the EV Group EV 620 have exposure optics?

The EV Group EV 620 does not have exposure optics.[1][2]

What type of operation is the EV Group EV 620 used for?

The EV Group EV 620 is a manual aligner for wafer bonding.[1][2]

What equipment family does the EV Group EV 620 belong to?

The EV Group EV 620 family contains the EV 620 model.[3]

Not publicly documented

The following facts about the EV 620 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the EV 620 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the EV 620 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the EV 620 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the EV 620 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the EV 620 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]waferpedia.com — waferpedia.comwaferpedia.com
  3. [3]EV Group EV 620 family | Waferpedia — waferpedia.comwaferpedia.com
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Last updated Oct 13, 2026.

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