Comparison ledger
Brooks 017-0146-01 Prealigner, Nikon NSR 2005 i 10 C i-Line, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0146-01 PrealignerBrooks | |
|---|---|---|
| OEM | Brooks | Nikon |
| Category | Lithography | Lithography |
| Wafer size | — | No wafer handler |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0146-01 Prealigner | Nikon NSR 2005 |
| Specifications | ||
| Handler Type | — | SiC Handling[1] |
| Configuration | — | Cassette Stage[1] |
| Handler Options | — | SiC Substrate[1] |
| OS Version | — | Nikon Nest[1] |
| CDA | — | N2[1] |
| DIW | — | Chilled Water[1] |
| Power | — | 208, 3 Phase[1] |
| Wafer size | — | No wafer handler[1] |
| Tool type | — | i-Line Stepper[1] |
| Cassette stage | — | Cassette Stage[1] |
| Wafer handling robot | — | Nikon Robot[1] |
| Wafer handling end-effector | — | Nikon End-Effecter[1] |
| Handler option | — | SiC Substrate[1] |
| Communication interface | — | GEM / SECS[1] |
| Vacuum | — | Vacuum[1] |
| Cables | — | All cables present[1] |
| Parts condition | — | No missing or damaged parts[1] |
| Unit condition (one listing) | — | Parts Tool - Not able to produce wafers as-is - Heavy water damage - No wafer handler[1] |
| Vintage (one listing) | — | 1994[1] |
| Vintage (another listing) | — | 1996[2] |
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