Nikon

NSR 2005 i 10 C i-Line

Lithography No wafer handler Nikon NSR 2005 family

Research Quality: 30% complete

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NSR 2005 i 10 C i-Line — Inventory photo — Fig. 01NSR 2005 i 10 C i-LineInventory photo^[1]

Wafer size

No wafer handler

Power

208, 3 Phase^[1]

Vacuum

Vacuum^[1]

What is it?

The Nikon NSR 2005 i 10 C i-Line Stepper is a lithography stepper described with 6-inch wafer size and no wafer handler.

Why won't it start?

Documented failure modes, common issues, and field considerations.

Not able to produce wafers as-is
Heavy water damage
No wafer handler

What do the numbers mean?

Power & electrical1

Power: 208, 3 Phase^[1]

Vacuum & pumping1

Vacuum^[1]

Accurate?

Wafer handling6

Handler Type: SiC Handling^[1]; Cassette Stage^[1]; Nikon Robot^[1]
Handler Options: SiC Substrate^[1]; Not able to produce wafers as-is^[1]
Wafer size: No wafer handler^[1]

Dimensions & facilities1

CDA: N2^[1]

Configuration & options8

Nikon End-Effecter^[1]
OS Version: Nikon Nest^[1]; GEM / SECS^[1]
DIW: Chilled Water^[1]; All cables present^[1]; No missing or damaged parts^[1]; Parts Tool^[1]; Heavy water damage^[1]

Interested in this tool?

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

ConfigurationVacuum^[1]
Power208, 3 Phase^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the NSR 2005 i 10 C i-Line are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NSR 2005 i 10 C i-Line are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the NSR 2005 i 10 C i-Line are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the NSR 2005 i 10 C i-Line are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the NSR 2005 i 10 C i-Line is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the NSR 2005 i 10 C i-Line are on record.
Answerable by: an OEM parts catalog or a service engineer