Comparison ledger
Brooks 017-0146-01 Prealigner, Nikon NSR 2205 i 8 A i-Line, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0146-01 PrealignerBrooks | |
|---|---|---|
| OEM | Brooks | Nikon |
| Category | Lithography | Lithography |
| Wafer size | — | 6" |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0146-01 Prealigner | Nikon NSR 2205 |
| Specifications | ||
| Resolution | — | 0.5µm[1] |
| Computer Type | — | PDP11[2] |
| Rentical Size | — | 5 Inch[2] |
| Field Sizes | — | 15 / 17.5 / 20mm[2] |
| Wafer Size | — | 6 Inch Flat[2] |
| Reticle Libraries | — | 1[2] |
| Wafer Loader | — | Type 1[2] |
| Wafer size | — | Wafer Loader Pre-alignment 2[2] |
| Configuration | — | Barcode Reader[2] |
| Wafer Loader Indexers | — | 2[2] |
| Autofocus | — | Single Point[2] |
| Chuck Type | — | Ceramic Ring Chuck[2] |
| Water Stage | — | Ballscrew[2] |
| MCS2 Version | — | 2.4B[2] |
| OEM | — | Nikon[2] |
| Model | — | NSR 2205 i 8 A i-Line[2] |
| Category | — | Lithography[1] |
| Retical size | — | 5 Inch[2] |
| Wafer size flat | — | 6 Inch Flat[2] |
| Wafer loader pre-alignment | — | 2[2] |
| Barcode reader | — | Yes[2] |
| FIA | — | Yes[2] |
| LSA | — | Yes[2] |
| LIA | — | Yes[2] |
| Levelling | — | Yes[2] |
| Vintage | — | 1991[2] |
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