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Nikon

NSR 2205 i 8 A i-Line

Lithography6"Nikon NSR 2205 family
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NSR 2205 i 8 A i-Line — Inventory photo
Fig. 01NSR 2205 i 8 A i-LineInventory photo[1]

Wafer size

6"

Optics

0.5µm[1]

What is it?

Nikon NSR 2205 i 8 A i-Line Stepper is a 6-inch wafer lithography stepper with a listed 0.5 µm resolution.

What do the numbers mean?

Wafer handling5

Wafer Size
6 Inch Flat[1]
Accurate?
Wafer Loader
Type 1[1]
Accurate?
Wafer size
Wafer Loader Pre-alignment 2[1]
Accurate?
Wafer Loader Indexers
2[1]
Accurate?
Chuck Type
Ceramic Ring Chuck[1]
Accurate?

Optics & imaging2

Resolution
0.5µm[1]
Accurate?
Reticle Libraries
1[1]
Accurate?

Control & software1

Computer Type
PDP11[1]
Accurate?

Configuration & options10

Rentical Size
5 Inch[1]
Accurate?
Field Sizes
15 / 17.5 / 20mm[1]
Accurate?
Barcode Reader[1]
Accurate?
FIA[1]
Accurate?
LSA[1]
Accurate?
LIA[1]
Accurate?
Autofocus
Single Point[1]
Accurate?
Levelling[1]
Accurate?
Water Stage
Ballscrew[1]
Accurate?
MCS2 Version
2.4B[1]
Accurate?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the NSR 2205 i 8 A i-Line are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NSR 2205 i 8 A i-Line are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the NSR 2205 i 8 A i-Line are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the NSR 2205 i 8 A i-Line are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the NSR 2205 i 8 A i-Line are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the NSR 2205 i 8 A i-Line is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Inventory photo
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Last updated Jul 29, 2026.

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