Nikon

Wafer size
6"
Optics
0.5µm[2]
The Nikon NSR 2205 i 8 A i-Line uses a 5 inch reticle size. The Nikon NSR 2205 i 8 A i-Line supports field sizes of 15 mm, 17.5 mm, and 20 mm. The Nikon NSR 2205 i 8 A i-Line has 1 reticle library. The Nikon NSR 2205 i 8 A i-Line uses a Type 1 wafer loader with pre-alignment 2 and 2 wafer loader indexers. The Nikon NSR 2205 i 8 A i-Line includes a barcode reader. The Nikon NSR 2205 i 8 A i-Line includes FIA, LSA, and LIA. The Nikon NSR 2205 i 8 A i-Line uses single point autofocus and levelling. The Nikon NSR 2205 i 8 A i-Line uses a ceramic ring chuck. The Nikon NSR 2205 i 8 A i-Line uses a ballscrew water stage. The Nikon NSR 2205 i 8 A i-Line uses a PDP11 computer and MCS2 Version 2.4B.[1][2]
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The following facts about the NSR 2205 i 8 A i-Line are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NSR 2205 i 8 A i-Line are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the NSR 2205 i 8 A i-Line are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the NSR 2205 i 8 A i-Line are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the NSR 2205 i 8 A i-Line are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the NSR 2205 i 8 A i-Line is not on record.
Answerable by: an OEM datasheet or a fab qualification report
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Last updated Oct 16, 2026.
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