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017-0146-01 PrealignerversusNSR TFH i 14 DL i-Line

Brooks 017-0146-01 Prealigner, Nikon NSR TFH i 14 DL i-Line, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
017-0146-01 PrealignerBrooks
NSR TFH i 14 DL i-LineNikon
OEMBrooksNikon
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBrooks 017-0146-01 PrealignerNikon NSR
Specifications
Configuration—200-208V[1]
Phase—3 Phase[1]
OEM—Nikon[2]
Model—NSR TFH i 14 DL[2]
Type—Stepper[2]
Generation—i-line[2]
Wafer size—8 inch[1]
Power—200-208V - 3 Phase - 50/60 Hz - 72 FLA[1]
Vintage—2006[1]
017-0146-01 Prealigner entryNSR TFH i 14 DL i-Line entryAsk about these tools →Share experience with this comparison →

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]Equipment inventory listing