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Nikon

NSR TFH i 14 DL i-Line

LithographyNikon NSR family
Research Quality: 20% complete
NSR TFH i 14 DL i-Line — Inventory photo
Fig. 01NSR TFH i 14 DL i-LineInventory photo[1]

Power

200-208V[1]

Gas delivery

Power cabinet- gas regulator tower[1]

What is it?

What do the numbers mean?

Power & electrical3

200-208V[1]
Accurate?
Phase
3 Phase[1]
Accurate?
50/60 Hz[1]
Accurate?

Gas & chemistry1

Power cabinet- gas regulator tower[1]
Accurate?

Control & software1

Control rack[1]
Accurate?

Configuration & options3

72 FLA[1]
Accurate?
Includes:[1]
Accurate?
Quality Power Solutions uninterruptible power system w/ battery pack[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Configuration200-208V[1]
  • Phase3 Phase[1]
  • Configuration50/60 Hz[1]
  • ConfigurationPower cabinet- gas regulator tower[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What type of equipment is the Nikon NSR TFH i 14 DL i-Line?

It is a Nikon lithography stepper.[5][1]

Not publicly documented

The following facts about the NSR TFH i 14 DL i-Line are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NSR TFH i 14 DL i-Line are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the NSR TFH i 14 DL i-Line are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the NSR TFH i 14 DL i-Line are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the NSR TFH i 14 DL i-Line are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the NSR TFH i 14 DL i-Line is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (5)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
  3. [3]Inventory photo
  4. [4]Inventory photo
  5. [5]Equipment inventory listing
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Last updated Jul 29, 2026.

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