Comparison ledger
Brooks 017-0146-01 Prealigner, SUSS MicroTec MA 200 CC Exposure, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0146-01 PrealignerBrooks | MA 200 CC ExposureSUSS MicroTec |
|---|---|---|
| OEM | Brooks | SUSS MicroTec |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0146-01 Prealigner | SUSS MicroTec MA 200 |
| Specifications | ||
| Configuration | — | Damaged or Shortage:[1] |
| OEM | — | SUSS MicroTec[2] |
| Model | — | MA 200 CC[2] |
| Tool type | — | Lithography exposure tool[2] |
| Alignment mode | — | Top-side alignment[3] |
| Operation mode | — | Cassette to cassette operation[3] |
| Wafer capability | — | Up to 8"/200mm wafer capable[3] |
| Lamp house | — | 1000 Watt[3] |
| Power supply | — | Suss CIC 1000 Power Supply[3] |
| Optics | — | UV400 Optics for 365nm and 405nm exposure[3] |
| Objectives | — | 5x and 10x objectives[3] |
| Auto-alignment system | — | Suss Auto-alignment System[3] |
| Microscope | — | Suss DVM8 Microscope[3] |
| Vintage | — | 1999[3] |
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