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Heatpulse 8800 RTAversus1000 Hot Plate

Canon Heatpulse 8800 RTA, CEE 1000 Hot Plate, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
Heatpulse 8800 RTACanon
1000 Hot PlateCEE
OEMCanonCEE
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyCanon Heatpulse 8800 RTACEE 1000 Hot Plate
Specifications
Wafer Size8 inch[1]4 inch[3]
CategoryThermal / Diffusion[2]—
Configuration—4"[3]
Type—Hot Plate[3]
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Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]inventory listing