Comparison ledger
Cascade Microtech EPS150, Tenney , TPS JR-A-F4T Junior compact temperature test chambers, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | EPS150Cascade Microtech | |
|---|---|---|
| OEM | Cascade Microtech | Tenney |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Cascade Microtech EPS150 | Tenney , TPS JR-A-F4T Junior compact temperature test chambers |
| Specifications | ||
| OEM | Cascade MicroTech[1] | — |
| Model | EPS150 Triax[1] | JR-A-F4T[4] |
| Equipment type | Probe Station[1] | — |
| Configuration | Manual probe system with 4 independent probe micro-manipulators[2] | — |
| Configured instruments | Keithley 2450 SMU and Agilent LCR meter[2] | — |
| Light shield enclosure | Present[1] | — |
| Probe system | Manual probe system with 4 independent probe micro-manipulators[1] | — |
| Enclosure | Light shield enclosure[3] | — |
| Applications | I-V characterization; low current measurements; C-V characterization at multiple frequencies; resistance and conductance measurements; sheet resistance and resistivity measurements of substrates and deposited films[3] | — |
| SMU voltage measurement range | 10nV - 200V[1] | — |
| SMU voltage measurement resolution | 10nV on 20mV range, 5mV on 200V range[1] | — |
| SMU current measurement range | 10fA - 1A[1] | — |
| SMU current measurement resolution | 10fA on 10nA range, 1uA on 1A range[1] | — |
| LCR meter frequency range | 20Hz to 1MHz[1] | — |
| LCR meter test frequencies | over 8,600 test frequencies[1] | — |
| LCR meter basic accuracy | 0.05%[1] | — |
| LCR meter resolution | 6 digit resolution[1] | — |
| Chamber Size | — | 1.2 cubic feet[4] |
| Temperature Range | — | -68°C to +180°C[4] |
| Control | — | +/-1.0°C[4] |
| Manufacturer | — | Tenney[4] |
| Short description | — | Junior compact temperature test chambers[4] |
| Control accuracy | — | +/-1.0°C[4] |
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