Waferpedia

Cascade Microtech

EPS150

Test & ProbeCascade Microtech EPS150 family
Research Quality: 30% complete
LinkedIn X Email
Cascade MicrotechEPS150
No photo available yet

What is it?

The source lists the equipment as a Cascade EPS150 Triax probe station. It is described as a manual probe system with 4 independent probe micro-manipulators and a light shield enclosure, and it is configured with a Keithley 2450 SourceMeter SMU and an Agilent 4284A LCR meter. The stated uses include measuring current, voltage, resistance, capacitance, conductance, sheet resistance, and resistivity.

What can it run?

Process applications and technology nodes documented for this tool.

  • I-V characterization
  • Low current measurements
  • C-V characterization (at multiple frequencies)
  • Resistance and conductance measurements
  • Sheet resistance and resistivity measurements of substrates and deposited films

What do the numbers mean?

Configuration & options6

OEM
Cascade MicroTech[1]
Accurate?
Model
EPS150 Triax[1]
Accurate?
Equipment type
Probe Station[1]
Accurate?
Manual probe system with 4 independent probe micro-manipulators[2]
Accurate?
Configured instruments
Keithley 2450 SMU and Agilent LCR meter[2]
Accurate?
Light shield enclosure
Present[1]
Accurate?
Interested in this tool?
Embed spec card

What replaced it?

  • siblingSignatone S-302-4— Four-point resistivity probe station used with the probe station system.source[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the EPS150 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the EPS150 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the EPS150 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the EPS150 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the EPS150 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the EPS150 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]smif.pratt.duke.edu — smif.pratt.duke.edusmif.pratt.duke.edu
  2. [2]smif.pratt.duke.edu — smif.pratt.duke.edusmif.pratt.duke.edu
Was this page accurate?

Last updated Jul 29, 2026.

Compare with similar tools

View all →
1007KLA

The KLA 1007 is a wafer prober manufactured by KLA.

CategoryTest & Probe
6 specs
EPS150 vs 1007 →
1034Electroglas

The Electroglas 1034 Prober is a semiconductor wafer prober manufactured by Electroglas.

CategoryTest & Probe
EPS150 vs 1034 →
1070Signatone
CategoryTest & Probe
EPS150 vs 1070 →
11000Cascade Microtech
CategoryTest & Probe
11 specs
EPS150 vs 11000 →
1160Signatone

The Signatone 1160 is a probe station microscope for viewing samples and parametric probing of devices.

CategoryTest & Probe
9 specs
EPS150 vs 1160 →
11729 C Carrier Noise Test SetAgilent

The Agilent 11729C Carrier Noise Test Set is an integral part of a phase noise measurement system, capable of up-converting, down-converting, and phase/frequency demodulation.

CategoryTest & Probe
2 specs
EPS150 vs 11729 C Carrier Noise Test Set →