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Comparison ledger

100 SpinversusFalcon ACS 200 Coater Developer Cluster

CEE 100 Spin, SUSS MicroTec Falcon ACS 200 Coater Developer Cluster, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
OEMCEESUSS MicroTec
CategoryResist ProcessingResist Processing
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyCEE 100SUSS MicroTec Falcon
Cited variants—
  • Falcon ACS 200[1]
Specifications
ConfigurationVolts 115[2]Developer (4)[1]
Wafer Sizes—4, 5, 6, 8 inch[3]
Configuration (Asset #142142)—Developer (4) 2000 Vintage[1]
Configuration (Asset #142141)—Coater (3) 2000 Vintage[3]
OEM—SUSS[1]
Model—Falcon ACS 200[4]
Equipment type—Coater / Developer Cluster System[4]
Category—Resist Processing[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]waferpedia.comwaferpedia.com