Waferpedia

Comparison ledger

1000 Hot Plateversus6 A

CEE 1000 Hot Plate, YES 6 A, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
6 AYES
OEMCEEYES
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyCEE 1000 Hot PlateYES 6 A
Specifications
Configuration4"[1]HMDS[2]
TypeHot Plate[1]—
Wafer Size4 inch[1]—
Voltage—120 V[2]
Frequency—60 Hz[2]
OEM—YES[2]
Model—6 A[2]
Equipment type—Oven[2]
Process description—HMDS[2]
Power—1700 Watts[2]
Current—14 A[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing