Waferpedia

Comparison ledger

BTT IV Thermal versus DV 502 A Vacuum

Denton Vacuum BTT IV Thermal and Denton Vacuum DV 502 A Vacuum, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
BTT IV ThermalDenton Vacuum
DV 502 A VacuumDenton Vacuum
OEMDenton VacuumDenton Vacuum
CategoryDepositionDeposition
Wafer size
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyDenton Vacuum BTT IV ThermalDenton Vacuum DV 502 A Vacuum
Specifications
Voltage208 V, Single Phase, 50/60 Hz, 20 A[1]
ConfigurationBenchtop[1]12” diameter x 12” H bell jar with implosion guard[2]

Plan your fab

Building a Deposition process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing