Waferpedia

Comparison ledger

BTT IV Thermal versus Explorer 14

Denton Vacuum BTT IV Thermal and Denton Vacuum Explorer 14, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
BTT IV ThermalDenton Vacuum
Explorer 14Denton Vacuum
OEMDenton VacuumDenton Vacuum
CategoryDepositionDeposition
Wafer size
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyDenton Vacuum BTT IV ThermalDenton Vacuum Explorer 14
Specifications
Voltage208 V, Single Phase, 50/60 Hz, 20 A[1]
ConfigurationBenchtop[1]2 RF Cathodes, RF Plasma Clean[2]
Chamber14"x 14"[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing