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Denton Vacuum

Explorer 14

DepositionDenton Vacuum Explorer 14 family
Research Quality: 40% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

Explorer 14 — Inventory photo
Fig. 01Explorer 14Inventory photo[1]

Power

2 RF Cathodes, RF Plasma Clean[1]

Vacuum

Turbo Pump is non-functional[1]

What is it?

The Denton Explorer 14 is a sputtering system with a 14-inch by 14-inch chamber, two RF cathodes, and RF plasma clean support.

Why won't it start?

Documented failure modes, common issues, and field considerations.

  • Turbo pump is non-functional

What do the numbers mean?

Power & electrical1

2 RF Cathodes, RF Plasma Clean[1]
Accurate?

Vacuum & pumping1

Turbo Pump is non-functional[1]
Accurate?

Configuration & options1

Chamber
14"x 14"[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Configuration2 RF Cathodes, RF Plasma Clean[1]
  • ConfigurationTurbo Pump is non-functional[1]

Where are the manuals?

Publicly hosted documents referencing this tool, linked at their original location. Hosted by the linked institutions — availability may change.

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Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the Explorer 14 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Explorer 14 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Explorer 14 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Explorer 14 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • The process node or technology generation of the Explorer 14 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the Explorer 14 are on record.

    Answerable by: an OEM parts catalog or a service engineer

Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]dep-03_denton_operating_manual.pdfnanocenter.umd.edunanocenter.umd.edu
  3. [3]Explorer-14 High Vacuum Carbon Evaporatordentonvacuum.com (Jul 20, 2006)web.archive.org
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Last updated Jul 29, 2026.

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