Comparison ledger
Denton Vacuum Discovery Cathode and Denton Vacuum Thermal, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | Discovery CathodeDenton Vacuum | ThermalDenton Vacuum |
|---|---|---|
| OEM | Denton Vacuum | Denton Vacuum |
| Category | Deposition | Deposition |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Denton Vacuum Discovery | Denton Vacuum Thermal |
| Specifications | ||
| Configuration | 12.0" sputtering system with planetary Load lock and robot loading assemblies[1] | Diffusion Pump[2] |
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