Denton Vacuum
Discovery Cathode
Plate 01Denton Vacuum System: Changing a Cathode in a Discovery Sputtering System
Denton VacuumWatch on YouTube
What is it?
What do the numbers mean?
Power & electrical2
Vacuum & pumping7
- CTI Cryogenics High Vacuum Pump/Blanket Heater[1]
- Torr400 Cryopump with Oxford E500 Dual Temperature Monitor[1]
- KYKY F400 Turbo Molecular Pump[1]
- With FV-LII Pump Controller[1]
- Vat Adaptive Pressure Controller[1]
- Assorted Pressure Monitors[1]
- CTI-Cryogenics 9600 Compressor[1]
Wafer handling2
Gas & chemistry1
- Veeco 5 cm Gridded Ion Source with Gas Controls[1]
Control & software2
Configuration & options6
What replaced it?
Alternatives
Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.
- Leybold MAG W 2800 CT Turbo— Same function class: Deposition, UnknownCompare in depthsource[2]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- ConfigurationVeeco 5 cm Gridded Ion Source with Gas Controls[1]
- ConfigurationCTI Cryogenics High Vacuum Pump/Blanket Heater[1]
- ConfigurationTorr400 Cryopump with Oxford E500 Dual Temperature Monitor[1]
- ConfigurationKYKY F400 Turbo Molecular Pump[1]
- ConfigurationWith FV-LII Pump Controller[1]
- ConfigurationVat Adaptive Pressure Controller[1]
- Configuration(4) Advance Energy Pinnacle plus DC Power Supplies[1]
- ConfigurationAssorted Pressure Monitors[1]
- ConfigurationCTI-Cryogenics 9600 Compressor[1]
- ConfigurationStand Alone Power Supply/Control[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the Discovery Cathode are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Discovery Cathode are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Discovery Cathode are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Discovery Cathode are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Discovery Cathode are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Discovery Cathode is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Equipment inventory listing
Last updated Jul 29, 2026.
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The Leybold MAG W 2800 CT is a turbo pump designed for vacuum systems, operating at 480 Hz.
