Waferpedia

Comparison ledger

Discovery versus Infinity 18

Denton Vacuum Discovery and Denton Vacuum Infinity 18, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
DiscoveryDenton Vacuum
Infinity 18Denton Vacuum
OEMDenton VacuumDenton Vacuum
CategoryDepositionDeposition
Wafer size
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyDenton Vacuum DiscoveryDenton Vacuum Infinity 18
Specifications
ConfigurationWith Lipon Deposition[1]Telemark 860 deposition controller panel[2]
Chamber size18" x 23" x 36"[2]
Voltage208V, 3Ph, 50/60Hz, 70A[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing