Denton Vacuum
Discovery
Plate 01Denton Vacuum System: The Discovery Sputter Module for High-Volume III-V Semiconductor Manufacturing
Denton VacuumWatch on YouTubePlate 02Denton Vacuum: The Accidental Ion Source: A Discovery from a Failed Experiment
Denton VacuumWatch on YouTubePlate 03Denton Vacuum System: Changing a Cathode in a Discovery Sputtering System
Denton VacuumWatch on YouTube
What is it?
What do the numbers mean?
Power & electrical4
Vacuum & pumping6
Control & software2
Configuration & options5
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- ConfigurationDenton Vacuum[1]
- ConfigurationAngstorm Sciences RF Cathodes with Power Supplies / Controllers (2)[1]
- ConfigurationRF Turners (2)[1]
- ConfigurationCTI Cryogenics Cryo Torr 8 Cryogenic Pump with Monitor[1]
- ConfigurationKYKY Turbo Pump with MDL 1200 H Controller[1]
- ConfigurationAdvanced Energy Dressler Cesar RF Power Generator (2)[1]
- ConfigurationRelated Pressure Monitors[1]
- ConfigurationB&W MDL TRP 90 Vacuum Pump[1]
- ConfigurationStand Alone Power Supply / Control[1]
- ConfigurationCTI Cryogenics 8200 Compressor[1]
Where are the manuals?
Publicly hosted documents referencing this tool, linked at their original location. Hosted by the linked institutions — availability may change.
- Denton Discovery 18 SOPSOPutah.edu
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the Discovery are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Discovery are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Discovery are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Discovery are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Discovery are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Discovery is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Denton Discovery 18 | Utah Nanofab — nanofab.utah.edunanofab.utah.edu
- [3]Denton Discovery Sputterer | UCLA Nanolab — nanolab.ucla.edunanolab.ucla.edu
- [4]How magnetron sputtering works in thin film deposition — dentonvacuum.com (Jan 14, 2025)web.archive.org
Last updated Jul 29, 2026.
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