Waferpedia

Comparison ledger

DV 502 A Vacuum versus Infinity 18

Denton Vacuum DV 502 A Vacuum and Denton Vacuum Infinity 18, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
DV 502 A VacuumDenton Vacuum
Infinity 18Denton Vacuum
OEMDenton VacuumDenton Vacuum
CategoryDepositionDeposition
Wafer size
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyDenton Vacuum DV 502 A VacuumDenton Vacuum Infinity 18
Specifications
Configuration12” diameter x 12” H bell jar with implosion guard[1]Telemark 860 deposition controller panel[2]
Chamber size18" x 23" x 36"[2]
Voltage208V, 3Ph, 50/60Hz, 70A[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing