Comparison ledger
Denton Vacuum Explorer 14 and Denton Vacuum Infinity 18, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | Explorer 14Denton Vacuum | Infinity 18Denton Vacuum |
|---|---|---|
| OEM | Denton Vacuum | Denton Vacuum |
| Category | Deposition | Deposition |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Denton Vacuum Explorer 14 | Denton Vacuum Infinity 18 |
| Specifications | ||
| Chamber | 14"x 14"[1] | — |
| Configuration | 2 RF Cathodes, RF Plasma Clean[1] | Telemark 860 deposition controller panel[2] |
| Chamber size | — | 18" x 23" x 36"[2] |
| Voltage | — | 208V, 3Ph, 50/60Hz, 70A[2] |
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