Waferpedia

Comparison ledger

Explorer 14 versus Thermal

Denton Vacuum Explorer 14 and Denton Vacuum Thermal, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
Explorer 14Denton Vacuum
ThermalDenton Vacuum
OEMDenton VacuumDenton Vacuum
CategoryDepositionDeposition
Wafer size
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyDenton Vacuum Explorer 14Denton Vacuum Thermal
Specifications
Chamber14"x 14"[1]
Configuration2 RF Cathodes, RF Plasma Clean[1]Diffusion Pump[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing