Comparison ledger
Denton Vacuum SJ20C/Material and Denton Vacuum Thermal, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | SJ20C/MaterialDenton Vacuum | ThermalDenton Vacuum |
|---|---|---|
| OEM | Denton Vacuum | Denton Vacuum |
| Category | Deposition | Deposition |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Denton Vacuum SJ20C/Material | Denton Vacuum Thermal |
| Specifications | ||
| Tool owner | Jim Pierce[1] | — |
| Serial number | 18097[1] | — |
| Tool description | Film thickness monitor/deposition controller[1] | — |
| Process | E-beam evaporation[1] | — |
| Evaporation materials available | Al, Ag, Au, Au/Ge, Cr, Cu, Ge, Mo, NiCr, Nb, Ni, Ta, Ti, W[1] | — |
| Crucible liners | Poco Graphite crucible liners (large and small); Cu crucible liners[1] | — |
| SOP | Denton SJ20C SOP[1] | — |
| Process Type | E-beam evaporation[1] | — |
| Deposition Method | Physical Vapor Deposition (PVD)[1] | — |
| Number of Source Hearth Positions | 4[1] | — |
| Film Thickness Monitor/Deposition Controller | Present[1] | — |
| Crucible Liner Types | Poco Graphite (large & small), Cu[1] | — |
| Configuration | — | Diffusion Pump[2] |
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