Denton Vacuum
SJ20C/Material
The Denton SJ20C is an e-beam evaporation system for physical vapor deposition. The Denton SJ20C uses a high-energy beam to heat and evaporate a specific material in a vacuum chamber. The Denton SJ20C can deposit a wide range of materials including Al, Ag, Au, Au/Ge, Cr, Cu, Ge, Mo, NiCr, Nb, Ni, Ta, and Ti.[1]
What it is
The Denton Vacuum SJ20C is an e-beam evaporation system used for physical vapor deposition. The system includes a four-source hearth and a film thickness monitor. Evaporation materials available include aluminum, silver, gold, gold-germanium, chromium, copper, germanium, molybdenum, nickel-chromium, niobium, nickel, tantalum, titanium, and tungsten.[1]
Where it fits in the process flow
General reference — not yet source-verifiedE-beam evaporation systems are used in semiconductor fabrication for depositing thin films of metals and dielectrics. The process typically follows photolithography and etching steps, where the deposited film forms conductive or insulating layers. The substrate is loaded into the vacuum chamber, and after deposition, the wafer may undergo lift-off or further processing.
Applications
The Denton SJ20C is used for depositing a wide range of materials, including high-temperature metals and ceramics. Applications include optical coatings, semiconductor manufacturing, and temperature-resistant coatings. The system can deposit aluminum, silver, gold, gold-germanium, chromium, copper, germanium, molybdenum, nickel-chromium, niobium, nickel, tantalum, titanium, and tungsten.[1]
- Thin-film deposition
- E-beam evaporation
What do the numbers mean?
Control & software2
Configuration & options10
- Evaporation materials available
- Al, Ag, Au, Au/Ge, Cr, Cu, Ge, Mo, NiCr, Nb, Ni, Ta, Ti, W[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the SJ20C/Material are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SJ20C/Material are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the SJ20C/Material are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the SJ20C/Material are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the SJ20C/Material are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the SJ20C/Material is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]nanofab.utah.edu — nanofab.utah.edunanofab.utah.edu
Last updated Aug 14, 2026.
Compare with similar tools
View all →
The Oxford 100 Nitride is a deposition system manufactured by Oxford Instruments for depositing nitride layers.
