Comparison ledger
Denton Vacuum SJ20C and Denton Vacuum Thermal, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | SJ20CDenton Vacuum | ThermalDenton Vacuum |
|---|---|---|
| OEM | Denton Vacuum | Denton Vacuum |
| Category | Deposition | Deposition |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Denton Vacuum SJ20C | Denton Vacuum Thermal |
| Specifications | ||
| Tool owner | Jim Pierce[1] | — |
| Serial number | 18097[1] | — |
| Description | Film thickness monitor/deposition controller[1] | — |
| Deposition method | E-beam evaporation[1] | — |
| Source hearths | 4 source hearth[1] | — |
| Evaporation materials available | Al, Ag, Au, Au/Ge, Cr, Cu, Ge, Mo, NiCr, Nb, Ni, Ta, Ti, W[1] | — |
| Crucible liner types | Poco Graphite crucible liners (large & small); Cu crucible liners[1] | — |
| Configuration | — | Diffusion Pump[2] |
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