Denton Vacuum

SJ20C

Research Quality: 40% complete

What is it?

The Denton SJ20C is listed as a deposition tool for e-beam evaporation. The source identifies it as a film thickness monitor/deposition controller and states that it uses evaporation materials including Al, Ag, Au, Au/Ge, Cr, Cu, Ge, Mo, NiCr, Nb, Ni, Ta, Ti, and W.

What can it run?

Process applications and technology nodes documented for this tool.

Thin-film deposition
E-beam evaporation

What do the numbers mean?

Control & software1

Description: Film thickness monitor/deposition controller^[1]

Configuration & options6

Tool owner: Jim Pierce^[1]
Serial number: 18097^[1]
Deposition method: E-beam evaporation^[1]
Source hearths: 4 source hearth^[1]
Evaporation materials available: Al, Ag, Au, Au/Ge, Cr, Cu, Ge, Mo, NiCr, Nb, Ni, Ta, Ti, W^[1]
Crucible liner types: Poco Graphite crucible liners (large & small); Cu crucible liners^[1]

Interested in this tool?

Embed spec card

What replaced it?

siblingDenton Vacuum 635— Listed on the same equipment page under deposition alongside Denton 635.source^[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the SJ20C are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SJ20C are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the SJ20C are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the SJ20C are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the SJ20C are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the SJ20C is not on record.
Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (3)Every fact above is drawn from these public sources

[1]nanofab.utah.edu — nanofab.utah.edunanofab.utah.edu
[2]Equipment Page | Utah Nanofab — nanofab.utah.edunanofab.utah.edu
[3]https://www.nanofab.utah.edu/wp-content/uploads/2024/01/Denton-SJ20C-E-Beam-SOP-1.pdf — nanofab.utah.edunanofab.utah.edu