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Comparison ledger

3220 versus DAD321

Disco 3220 and Disco DAD321, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
3220Disco
DAD321Disco
OEMDiscoDisco
CategoryDicing & GrindingDicing & Grinding
Wafer size100mm
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyDisco 3220Disco DAD321
Specifications
equipment typedicing saw[1]
Workplace sizeø150 mm[2]
Spindle layoutSingle[2]
Spindle output1.5 kW at 30,000 min-1[2]
Spindle max revolution speed40,000 min-1[2]
X-axis feed speed range0.1 – 500 mm/s[2]
Y-axis index step0.0001 mm[2]
Z-axis repeating accuracy0.001 mm[2]
Z-axis max blade sizeø58 mm[2]
Machine typeAutomatic dicing saw[3]
Wafer size100 mm, 150 mm[3]
Supported wafer materialsSilicon, glass and pyrex wafers[3]
Other materialsOther materials on demand[3]
Maximum thickness on silicon1 mm[3]
Maximum thickness on glass and pyrex2.4 mm[3]
Max wafer size6 inches[4]
Wafer typeAll shapes and sizes[4]
Max wafer thickness2 mm[4]
Max blade speed30,000 rpm[4]
Max feed speed2 mm/sec[4]
Tape thickness70 μm[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]nanofab.utah.edunanofab.utah.edu
  2. [2]semistarcorp.comsemistarcorp.com
  3. [3]epfl.chepfl.ch
  4. [4]ncf.uic.eduncf.uic.edu