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Comparison ledger

3220 versus DAG810

Disco 3220 and Disco DAG810, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
3220Disco
DAG810Disco
OEMDiscoDisco
CategoryDicing & GrindingDicing & Grinding
Wafer size4"
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyDisco 3220Disco DAG810
Specifications
equipment typedicing saw[1]
Workplace sizeø150 mm[2]
Spindle layoutSingle[2]
Spindle output1.5 kW at 30,000 min-1[2]
Spindle max revolution speed40,000 min-1[2]
X-axis feed speed range0.1 – 500 mm/s[2]
Y-axis index step0.0001 mm[2]
Z-axis repeating accuracy0.001 mm[2]
Z-axis max blade sizeø58 mm[2]
Equipment typecompact, automatic grinder[3]
Materialssilicon, III/V materials (GaN, GaAs, InP), and various glass types (pure amorphous SiO2, float glass, pyrex)[3]
Wafer sizes supported by universal vacuum chuck table4", 5", 6", and 8"[3]
Mechanical frame usefor UV-tape mounted wafers or chips[3]
Spindlehigh-rigidity, low-vibration spindle[3]
Grinding wheelsdedicated wheels for coarse and fine silicon grinding, coarse and fine glass grinding, and GaN fine grinding[3]
Probe-heightreal-time probe-height from 4" wafer size[3]
User interfaceLCD touch screen[3]
Grinding speedas high as 30 microns/min[3]
Thickness variationtotal thickness variation close to one micron[3]
Surface roughnessless than 100 nm[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]nanofab.utah.edunanofab.utah.edu
  2. [2]semistarcorp.comsemistarcorp.com
  3. [3]epfl.chepfl.ch