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Comparison ledger

3220versusDFG 8540 Back

Disco 3220, Disco DFG 8540 Back, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
3220Disco
OEMDiscoDisco
CategoryDicing & GrindingDicing & Grinding
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyDisco 3220Disco DFG
Specifications
equipment typedicing saw[1]—
Workplace sizeø150 mm[2]—
Spindle layoutSingle[2]—
Spindle output1.5 kW at 30,000 min-1[2]—
Spindle max revolution speed40,000 min-1[2]—
X-axis feed speed range0.1 – 500 mm/s[2]—
Y-axis index step0.0001 mm[2]—
Z-axis repeating accuracy0.001 mm[2]—
Z-axis max blade sizeø58 mm[2]—
Configuration—6" / 8" Universal Table for IGBT Si[3]
Voltage—200 VAC[3]
Phase—3 Phase[3]
Full Load—54 A[3]
Make—Disco[3]
Model—DFG 8540[3]
Equipment type—Back Grinder[3]
Wafer sizes—6, 8 inch[3]
Grinding method—Anomalous in-feed grinding with wafer rotation[4]
Supported workpiece size—Φ8 inch (Φ4, 5, 6, 8 inch with universal chuck table use)[4]
Grinding wheels—Φ200 mm Diamond Wheel[4]
Spindle rated output—4.2 kW[4]
Rotation speed range—1,000 to 7,000 min-1[4]
Equipment dimensions (W × D × H)—1,200 × 2,670 × 1,800 mm[4]
Equipment weight—Approx. 3,100 kg[4]
Processing capability—Large diameter grinding and thin-finish grinding[5]
Thin wafer handling—Ultra-thin wafer handling to 100 µm and less[5]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]nanofab.utah.edunanofab.utah.edu
  2. [2]semistarcorp.comsemistarcorp.com
  3. [3]inventory listing
  4. [4]disco.co.jpdisco.co.jp
  5. [5]s3-alliance.coms3-alliance.com