Waferpedia

Comparison ledger

3220 versus DFL 7361

Disco 3220 and Disco DFL 7361, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
3220Disco
OEMDiscoDisco
CategoryDicing & GrindingDicing & Grinding
Wafer sizeIntegrated Wafer Cleaning System with Atomizing Nozzle
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyDisco 3220Disco DFL
Cited variants
  • SECS/GEM Software[1]
  • Intemal lighting[1]
  • Virus-free PC[1]
  • STM DFL7161 2021 SW unified[1]
  • Barcode reading function for auto recipe loading[1]
  • Compatibility with Hogomax 5L tanks[1]
  • Change of Laser Focus Position for Maintenance[1]
  • Additional Kerf check sequence[1]
  • Password Modification up to Level 4[1]
  • Disco CO2 Injector + Integration specs[1]
  • CO2 injector (stand-alone) added[1]
  • Addition of drain valve for CO 2 injector specific resistance value stabilization[1]
  • CO2 water target resistivity value Settable in device data[1]
  • CO2 bubbler support (RS232C)[1]
  • New version Zxis assembly for DFL7161 with higher rigidity specs (standard for STM)[1]
Specifications
equipment typedicing saw[2]
Workplace sizeø150 mm[3]
Spindle layoutSingle[3]
Spindle output1.5 kW at 30,000 min-1[3]
Spindle max revolution speed40,000 min-1[3]
X-axis feed speed range0.1 – 500 mm/s[3]
Y-axis index step0.0001 mm[3]
Z-axis repeating accuracy0.001 mm[3]
Z-axis max blade sizeø58 mm[3]
ConfigurationType FX Laser Head[1]
Wafer sizeIntegrated Wafer Cleaning System with Atomizing Nozzle[1]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]nanofab.utah.edunanofab.utah.edu
  3. [3]semistarcorp.comsemistarcorp.com