Disco
DFL 7361
Wafer size
Integrated Wafer Cleaning System with Atomizing Nozzle
Power
Uninterruptible Power Supply[1]
Optics
Type FX Laser Head[1]
What is it?
What do the numbers mean?
Power & electrical1
- Uninterruptible Power Supply[1]
Wafer handling5
Optics & imaging3
Control & software3
Configuration & options8
- Fully Automatic Frame Handling System[1]
- Independent Hogomax spin coating system[1]
- Duct Unit (Internal Type)[1]
- Overseas Transformer Unit[1]
- Operation & Troubleshooting Manual (English)[1]
- Installation and 3-days Operation Training[1]
- Options:[1]
- Intemal lighting[1]
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| SECS/GEM Software | — | — | Listed as an option. | Equipment inventory listing[1] |
| Intemal lighting | — | — | Listed as an option. | Equipment inventory listing[1] |
| Virus-free PC | — | — | Listed as an option. | Equipment inventory listing[1] |
| STM DFL7161 2021 SW unified | — | — | Listed as an option. | Equipment inventory listing[1] |
| Barcode reading function for auto recipe loading | — | — | Listed as an option. | Equipment inventory listing[1] |
| Compatibility with Hogomax 5L tanks | — | — | Listed as an option. | Equipment inventory listing[1] |
| Change of Laser Focus Position for Maintenance | — | — | Listed as an option. | Equipment inventory listing[1] |
| Additional Kerf check sequence | — | — | Listed as an option. | Equipment inventory listing[1] |
| Password Modification up to Level 4 | — | — | Listed as an option. | Equipment inventory listing[1] |
| Disco CO2 Injector + Integration specs | — | — | Listed as an option. | Equipment inventory listing[1] |
| CO2 injector (stand-alone) added | — | — | Listed as an option. | Equipment inventory listing[1] |
| Addition of drain valve for CO 2 injector specific resistance value stabilization | — | — | Listed as an option. | Equipment inventory listing[1] |
| CO2 water target resistivity value Settable in device data | — | — | Listed as an option. | Equipment inventory listing[1] |
| CO2 bubbler support (RS232C) | — | — | Listed as an option. | Equipment inventory listing[1] |
| New version Zxis assembly for DFL7161 with higher rigidity specs (standard for STM) | — | — | Listed as an option. | Equipment inventory listing[1] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- ConfigurationUninterruptible Power Supply[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the DFL 7361 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the DFL 7361 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the DFL 7361 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the DFL 7361 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the DFL 7361 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the DFL 7361 are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (6)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]Inventory photo
- [4]Inventory photo
- [5]Equipment inventory listing
- [6]雷射切割機 | 7000系列 | For Ablation processing - DISCO Corporation — disco.co.jp (Jul 3, 2015)web.archive.org
Last updated Jul 29, 2026.
