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Comparison ledger

3220 versus Z09

Disco 3220 and Disco Z09, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
3220Disco
Z09Disco
OEMDiscoDisco
CategoryDicing & GrindingDicing & Grinding
Wafer sizeup to Φ8” workpieces
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyDisco 3220Disco Z09
Specifications
equipment typedicing saw[1]
Workplace sizeø150 mm[2]
Spindle layoutSingle[2]
Spindle output1.5 kW at 30,000 min-1[2]
Spindle max revolution speed40,000 min-1[2]
X-axis feed speed range0.1 – 500 mm/s[2]
Y-axis index step0.0001 mm[2]
Z-axis repeating accuracy0.001 mm[2]
Z-axis max blade sizeø58 mm[2]
ModelDAD3241[3]
Max. workpiece sizeΦ8”[3]
X-/Y-axis cutting range210 mm[3]
Cutting speed0.1-800 mm/s[3]
Index positioning accuracy0.002/210 mm[3]
Z-axis max. stroke32.2 mm[3]
Moving resolution0.000002 mm[3]
Repeatability accuracy0.001 mm[3]
Θ-axis max. rotating angle320°[3]
Rotation speed range6,000-60,000 rpm[3]
Spindle power1.8 kW[3]
Control interfacePC and touch screen via a specialized interface system[3]
Built-in microscopeYes[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]nanofab.utah.edunanofab.utah.edu
  2. [2]semistarcorp.comsemistarcorp.com
  3. [3]aggiefab.tamu.eduaggiefab.tamu.edu