Waferpedia

Comparison ledger

DAD321 versus KR15

Disco DAD321 and Disco KR15, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
DAD321Disco
KR15Disco
OEMDiscoDisco
CategoryDicing & GrindingDicing & Grinding
Wafer size100mm8"
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyDisco DAD321Disco KR15
Cited variants
  • KR15-A/KR15-B[1]
Specifications
Machine typeAutomatic dicing saw[2]
Wafer size100 mm, 150 mm[2]
Supported wafer materialsSilicon, glass and pyrex wafers[2]
Other materialsOther materials on demand[2]
Maximum thickness on silicon1 mm[2]
Maximum thickness on glass and pyrex2.4 mm[2]
Max wafer size6 inches[3]
Wafer typeAll shapes and sizes[3]
Max wafer thickness2 mm[3]
Max blade speed30,000 rpm[3]
Max feed speed2 mm/sec[3]
Tape thickness70 μm[3]
Blade designationDisco KR15[4]
Blade thickness200 micron[4]
Blade gritlow grit[4]
Intended materialssapphire, glass, and silicon[4]
Max. workpiece sizeΦ8"[4]
Thickness200 micron[4]
GritLow grit[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]thk.comthk.com
  2. [2]epfl.chepfl.ch
  3. [3]ncf.uic.eduncf.uic.edu
  4. [4]aggiefab.tamu.eduaggiefab.tamu.edu