Waferpedia

Comparison ledger

DAD3221 versus DAD641

Disco DAD3221 and Disco DAD641, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
DAD3221Disco
DAD641Disco
OEMDiscoDisco
CategoryDicing & GrindingDicing & Grinding
Wafer size150mm
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyDisco DAD3221Disco DAD641
Specifications
Typeautomatic dicing saw[1]
Wafer size100, 150 mm wafers[1]
Setupnon-contact setup[1]
Blade monitoringblade breakage detector[1]
Cutting functionscircle cut for edge trimming or down sizing[1]
Particle/ESD mitigationCO2 injector to prevent particle adhesion and electrostatic discharge damage[1]
Alignment aidspattern recognition system; automatic micro-alignment[1]
Tool typeDicing saw[2]
LocationBackend Lab[2]
Tool nameDisco DAD641[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]epfl.chepfl.ch
  2. [2]nanofab.utah.edunanofab.utah.edu
  3. [3]nanofab.utah.edunanofab.utah.edu