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Disco

DAD641

Dicing & GrindingDisco DAD641 family
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Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

DAD641 — nanofab.utah.edu
Fig. 01DAD641nanofab.utah.edu[1]

What it is

The Disco DAD641 is located in the Backend Lab of the Utah Nanofab cleanroom facility.[2]

How it works

General reference — not yet source-verified

Dicing saws use a rotating, thin diamond-impregnated blade to cut through semiconductor substrates along defined street lines between dies.

Where it fits in the process flow

General reference — not yet source-verified

The DAD641 is a back-end-of-line (BEOL) or assembly tool used after all front-end wafer fabrication steps are complete.

The dicing process separates individual device die from the wafer prior to further packaging steps such as die attach, wire bonding, or encapsulation.

Applications

The DAD641 has been used in research applications to prepare silicon substrates for near-field radiative heat transfer experiments, where wafers were diced into small square samples.[3]

What do the numbers mean?

Configuration & options3

Tool type
Dicing saw[2]
Accurate?
Location
Backend Lab[2]
Accurate?
Tool name
Disco DAD641[1]
Accurate?
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What replaced it?

  • siblingDisco DAD3220Listed on the same equipment page under packaging equipment.source[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Frequently asked questions

What types of substrates can the DAD641 dice?

The DAD641 can dice silicon, glass, quartz, and sapphire substrates, based on available blade types for these materials.[4]

What tape types are used with the DAD641 for dicing?

The DAD641 can use blue tape (130 micrometers thickness) or UV tape (160 micrometers thickness), the latter requiring UV exposure for release.[4]

How is the wafer protected during dicing on the DAD641?

The device side can be protected with photoresist, blue tape, or UV tape during the dicing process.[4]

Not publicly documented

The following facts about the DAD641 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the DAD641 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the DAD641 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the DAD641 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the DAD641 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the DAD641 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]nanofab.utah.edunanofab.utah.edunanofab.utah.edu
  2. [2]nanofab.utah.edunanofab.utah.edunanofab.utah.edu
  3. [3]https://arxiv.org/pdf/2003.03282arxiv.orgarxiv.org
  4. [4]Request Equipment Training or Service | Utah Nanofabnanofab.utah.edunanofab.utah.edu
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Last updated Aug 13, 2026.

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