Waferpedia

Comparison ledger

DAD3221 versus DFL 7560 L

Disco DAD3221 and Disco DFL 7560 L, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
DAD3221Disco
OEMDiscoDisco
CategoryDicing & GrindingDicing & Grinding
Wafer size150mmRobot Wafer handling
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyDisco DAD3221Disco DFL
Cited variants
  • 200mm Fully Automatic wafer handling from/to standard wafer cassette[1]
Specifications
Typeautomatic dicing saw[2]
Wafer size100, 150 mm wafers[2]Robot Wafer handling[1]
Setupnon-contact setup[2]
Blade monitoringblade breakage detector[2]
Cutting functionscircle cut for edge trimming or down sizing[2]
Particle/ESD mitigationCO2 injector to prevent particle adhesion and electrostatic discharge damage[2]
Alignment aidspattern recognition system; automatic micro-alignment[2]
WaferCan be modified at later date to 3”, 4” & 6” wafers and frame[1]
ConfigurationOperation by touch panel LCD monitor[1]
Uninterruptible Power Supply1[1]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]epfl.chepfl.ch