Disco
DFL 7560 L
Wafer size
Robot Wafer handling
Power
1[1]
What is it?
What do the numbers mean?
Power & electrical4
Wafer handling6
Optics & imaging1
- Low and High Magnification microscope with LED illumination[1]
Performance1
- Z axis positional repeatability 0.002mm Options: 1[1]
Control & software1
- X and Y axis with linear scale closed loop control[1]
Dimensions & facilities1
- Chiller unit to supply cooling water to X axis[1]
Configuration & options6
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| 200mm Fully Automatic wafer handling from/to standard wafer cassette | — | — | Machine modification includes 200mm fully automatic wafer handling from/to standard wafer cassette, chuck for 200mm wafers, new robot design for handling heavier wafers, new CE marking, 6 inch lens, and new Galvo Scanner. | Equipment inventory listing[1] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the DFL 7560 L are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the DFL 7560 L are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the DFL 7560 L are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the DFL 7560 L are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the DFL 7560 L is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the DFL 7560 L are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]激光切割机 | 7000系列 | 适用于烧蚀加工 - DISCO Corporation — disco.co.jp (Feb 22, 2020)web.archive.org
Last updated Jul 29, 2026.
