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Comparison ledger

DAD3221 versus R07

Disco DAD3221 and Disco R07, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
DAD3221Disco
R07Disco
OEMDiscoDisco
CategoryDicing & GrindingDicing & Grinding
Wafer size150mmup to Φ8”
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyDisco DAD3221Disco R07
Cited variants
  • R07-SDC600-BB101-75[1]
  • R07-SD400-BB200-75[1]
  • R07-SDC400-BB300-75[1]
  • R07-SDC400-BB500-75[1]
Specifications
Typeautomatic dicing saw[2]
Wafer size100, 150 mm wafers[2]
Setupnon-contact setup[2]
Blade monitoringblade breakage detector[2]
Cutting functionscircle cut for edge trimming or down sizing[2]
Particle/ESD mitigationCO2 injector to prevent particle adhesion and electrostatic discharge damage[2]
Alignment aidspattern recognition system; automatic micro-alignment[2]
ModelDAD3241[3]
Max. workpiece sizeΦ8”[3]
X-/Y-axis cutting range210 mm[3]
Cutting speed0.1-800 mm/s[3]
Index positioning accuracy0.002/210 mm[3]
Z-axis max. stroke32.2 mm[3]
Moving resolution0.000002 mm[3]
Repeatability accuracy0.001 mm[3]
Θ-axis max. rotating angle320°[3]
Rotation speed range6,000-60,000 rpm[3]
Spindle power1.8 kW[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]disco.co.jpdisco.co.jp
  2. [2]epfl.chepfl.ch
  3. [3]aggiefab.tamu.eduaggiefab.tamu.edu