Waferpedia

Comparison ledger

DAD3241 versus DAG810

Disco DAD3241 and Disco DAG810, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
DAD3241Disco
DAG810Disco
OEMDiscoDisco
CategoryDicing & GrindingDicing & Grinding
Wafer sizeup to Φ8”4"
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyDisco DAD3241Disco DAG810
Specifications
Max. workpiece sizeΦ8”[1]
X-/Y-axis cutting range210 mm[1]
Cutting speed0.1-800 mm/s[1]
Index positioning accuracy0.002/210 mm[1]
Z-axis max. stroke32.2 mm[1]
Moving resolution0.000002 mm[1]
Repeatability accuracy0.001 mm[1]
Θ-axis max. rotating angle320°[1]
Rotation speed range6,000-60,000 rpm[1]
Equipment typecompact, automatic grinder[2]
Materialssilicon, III/V materials (GaN, GaAs, InP), and various glass types (pure amorphous SiO2, float glass, pyrex)[2]
Wafer sizes supported by universal vacuum chuck table4", 5", 6", and 8"[2]
Mechanical frame usefor UV-tape mounted wafers or chips[2]
Spindlehigh-rigidity, low-vibration spindle[2]
Grinding wheelsdedicated wheels for coarse and fine silicon grinding, coarse and fine glass grinding, and GaN fine grinding[2]
Probe-heightreal-time probe-height from 4" wafer size[2]
User interfaceLCD touch screen[2]
Grinding speedas high as 30 microns/min[2]
Thickness variationtotal thickness variation close to one micron[2]
Surface roughnessless than 100 nm[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]aggiefab.tamu.eduaggiefab.tamu.edu
  2. [2]epfl.chepfl.ch