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DAG810 versus DFD 6240 Automatic Dicing

Disco DAG810 and Disco DFD 6240 Automatic Dicing, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
DAG810Disco
OEMDiscoDisco
CategoryDicing & GrindingDicing & Grinding
Wafer size4"
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyDisco DAG810Disco DFD
Specifications
Equipment typecompact, automatic grinder[1]
Materialssilicon, III/V materials (GaN, GaAs, InP), and various glass types (pure amorphous SiO2, float glass, pyrex)[1]
Wafer sizes supported by universal vacuum chuck table4", 5", 6", and 8"[1]
Mechanical frame usefor UV-tape mounted wafers or chips[1]
Spindlehigh-rigidity, low-vibration spindle[1]
Grinding wheelsdedicated wheels for coarse and fine silicon grinding, coarse and fine glass grinding, and GaN fine grinding[1]
Probe-heightreal-time probe-height from 4" wafer size[1]
User interfaceLCD touch screen[1]
Grinding speedas high as 30 microns/min[1]
Thickness variationtotal thickness variation close to one micron[1]
Surface roughnessless than 100 nm[1]
ConfigurationSingle Spindle (1.2KW)[2]
Phase3 Phase[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]epfl.chepfl.ch
  2. [2]inventory listing