Waferpedia

Comparison ledger

DCS 141 Wafer Cleaner Spinversus1000FP

Disco DCS 141 Wafer Cleaner Spin, YES 1000FP, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
OEMDiscoYES
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyDisco DCS 141YES 1000FP
Specifications
ConfigurationSingle Phase[1]—
Power AC220 V[1]—
Power1.5 kVA[1]—
OEMDisco[2]—
ModelDCS 141[2]Glen/YES 1000FP[3]
Equipment typeWafer Cleaner / Spin Dryer[2]—
Electrical phaseSingle Phase[1]—
Frequency50/60 Hz[1]—
Vintage2009[1]—
System type—Plasma cleaning system[3]
Line—R-Series Plasma Cleaning Systems (Glen Technologies)[3]
Designed use—Designed to accept a range of shelf sizes[3]
Application focus—Changing needs of the flat panel industry[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]Equipment inventory listing
  3. [3]web.archive.orgweb.archive.org