Waferpedia

YES

1000FP

Wet Processing / CleanYES 1000FP family
Research Quality: 30% complete
YES1000FP
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What is it?

The source describes the Glen/YES 1000FP as part of the R-Series plasma cleaning systems line. It is specifically described as a system designed to accept a range of shelf sizes to accommodate the changing needs of the flat panel industry.

What can it run?

Process applications and technology nodes documented for this tool.

  • Flat panel industry

What do the numbers mean?

Configuration & options5

System type
Plasma cleaning system[1]
Accurate?
Line
R-Series Plasma Cleaning Systems (Glen Technologies)[1]
Accurate?
Model
Glen/YES 1000FP[1]
Accurate?
Designed use
Designed to accept a range of shelf sizes[1]
Accurate?
Application focus
Changing needs of the flat panel industry[1]
Accurate?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the 1000FP are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 1000FP are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 1000FP are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 1000FP are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 1000FP are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 1000FP is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.orgweb.archive.org
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Last updated Jul 29, 2026.

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