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DFD 6360 Automatic Dicing versus Z09

Disco DFD 6360 Automatic Dicing and Disco Z09, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
Z09Disco
OEMDiscoDisco
CategoryDicing & GrindingDicing & Grinding
Wafer sizeup to Φ8” workpieces
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyDisco DFD 6360Disco Z09
Specifications
Phase3 Phase[1]
Configuration50/60 Hz[2]
ModelDAD3241[3]
Max. workpiece sizeΦ8”[3]
X-/Y-axis cutting range210 mm[3]
Cutting speed0.1-800 mm/s[3]
Index positioning accuracy0.002/210 mm[3]
Z-axis max. stroke32.2 mm[3]
Moving resolution0.000002 mm[3]
Repeatability accuracy0.001 mm[3]
Θ-axis max. rotating angle320°[3]
Rotation speed range6,000-60,000 rpm[3]
Spindle power1.8 kW[3]
Control interfacePC and touch screen via a specialized interface system[3]
Built-in microscopeYes[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]aggiefab.tamu.eduaggiefab.tamu.edu